SMC

XLH, High Vacuum Manual Angle Valve, Bellows Seal

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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • High vacuum angle valve
  • Type: manual, bellows seal
  • Flange size: 16 ~ 50
  • Heater type: H1 (80¡C), H2 (100¡C), H3 (120¡C)
  • Auto switches not available
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