XLG, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal
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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Air pressure applied to pilot port shifts piston-coupled valve
- Numerous maintenance parts available to extend useful life of valve
- Standard FKM seals, plus 8 additional seal compound options
- Auto switches mountable from 4 directions
- Optional 100¡C and 150¡C heaters (UL compliant lead wire)