SMC

XLDV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve

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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Light weight and compact
  • Uniform baking temperature
  • High fluorine resistance
  • Low outgassing
  • Little heavy metal contamination
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