XLDV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Light weight and compact
- Uniform baking temperature
- High fluorine resistance
- Low outgassing
- Little heavy metal contamination