SMC

XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release

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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • One-touch connection & release, requires no tools
  • Lightweight & compact
  • Auto switch capable
  • XLAQ: single acting, normally closed, bellows seal
  • XLAQ: flange sizes are 16, 25, 40, 50
  • XLDQ: 2-step control, single acting
  • XLDQ: flange sizes are 40, 50
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