SL5800, Single Stage Regulator for Ultra High Purity, Intermediate Flow
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Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy¨ internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- Body material: 316L SS secondary remelt
- Inlet pressure: max. 3800 psig (2.1 MPa)
- Springless design (no poppet spring in the wetted area)
- Intermediate flow