HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant
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HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1¡C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinertª and GALDEN¨.
- Cooling capacities: 8kW
- Circulating Fluid: Fluorinertª or GALDEN¨ (see catalog for compatibility)
- Temperature range setting: -20 to 40¡C
- Temperature stability: ±0.1¡C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47