SMC

AZ3542 & AZ4542, Diaphragm Valve, Air Operated

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Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in air operated.

  • Cleaned for high purity semiconductor applications
  • Cleanroom assembled and Helium leaked tested
  • Valve meets dimensional requirements of SEMI F36-0299, Option 1
  • User-friendly forged body
  • M5 actuation port
  • Compact and lightweight
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