AP500, Single Stage Compact Regulator for Ultra High Purity
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Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy¨ internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- Flow capacity: standard to 15 slpm; HF (option) to 30 slpm
- Body material: 316L SS secondary remelt
- Hastelloy¨ internals available for corrosion resistance
- Sub-atmospheric pressure delivery option