AP3571 & 4571, Diaphragm Valve, Air Operated, Two Step
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Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy¨ C22, 316L SS secondary remelt.
- Two step mode - metered flow and full open
- Two separate actuation ports
- Soft start valve to minimize vacuum chamber pressurization turbulence
- Metered flow adjustable
- Pneumatically actuated normally closed
- Body material: 316L SS secondary remelt