{"title":"Angle and In-line Valves","description":null,"products":[{"product_id":"xla-aluminum-high-vacuum-angle-valve-normally-closed-bellows-seal","title":"XLA, Aluminum High Vacuum Angle Valve, Normally Closed\/Bellows Seal","description":"\u003cp\u003eSeries XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  The vavle opens when pressure is applied at the pilot port.  The bellows assembly can be replaced, reducing maintenance costs and waste materials.  The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows.  Numerous seal materials are available for a wide range of chmical compatibility.\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eExcellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve\u003c\/li\u003e\n\u003cli\u003eHigh corrosion resistance to fluorine gas\u003c\/li\u003e\n\u003cli\u003eMinimal outgassing\u003c\/li\u003e\n\u003cli\u003eMinimal contamination from heavy metals\u003c\/li\u003e\n\u003cli\u003eOptional heaters\u003c\/li\u003e\n\u003cli\u003eOptional position sensors\u003c\/li\u003e\n\u003cli\u003eOptional oxalic acid anodizing for internals\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XL_US2.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721153572,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/8687l.jpg?v=1743161250"},{"product_id":"xlav-aluminum-high-vacuum-angle-valves-air-operated-w-solenoid-valve","title":"XLAV, Aluminum High Vacuum Angle Valves, Air Operated w\/Solenoid Valve","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eExcellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve\u003c\/li\u003e\n\u003cli\u003eHigh corrosion resistance to fluorine gas\u003c\/li\u003e\n\u003cli\u003eMinimal outgassing\u003c\/li\u003e\n\u003cli\u003eMinimal contamination from heavy metals\u003c\/li\u003e\n\u003cli\u003eOptional heaters\u003c\/li\u003e\n\u003cli\u003eOptional position sensors\u003c\/li\u003e\n\u003cli\u003eOptional oxalic acid anodizing for internals\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XL_US2.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721186340,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/XLAV_2.jpg?v=1743161253"},{"product_id":"xlg-aluminum-high-vacuum-angle-valve-double-acting-o-ring-seal","title":"XLG, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eAir pressure applied to pilot port shifts piston-coupled valve\u003c\/li\u003e\n\u003cli\u003eNumerous maintenance parts available to extend useful life of valve\u003c\/li\u003e\n\u003cli\u003eStandard FKM seals, plus 8 additional seal compound options\u003c\/li\u003e\n\u003cli\u003eAuto switches mountable from 4 directions\u003c\/li\u003e\n\u003cli\u003eOptional 100¡C and 150¡C heaters (UL compliant lead wire)\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/8490.jpg\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721219108,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/XLC.jpg?v=1743161255"},{"product_id":"xld-aluminum-high-vacuum-angle-valve-air-operated","title":"XLD, Aluminum High Vacuum Angle Valve, Air Operated","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eLight weight and compact\u003c\/li\u003e\n\u003cli\u003eUniform baking temperature\u003c\/li\u003e\n\u003cli\u003eHigh fluorine resistance\u003c\/li\u003e\n\u003cli\u003eLow outgassing\u003c\/li\u003e\n\u003cli\u003eLittle heavy metal contamination\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XL_US2.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721251876,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/8485.jpg?v=1743161255"},{"product_id":"xldv-aluminum-high-vacuum-angle-valves-air-operated-w-solenoid-valve","title":"XLDV, Aluminum High Vacuum Angle Valves, Air Operated w\/Solenoid Valve","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eLight weight and compact\u003c\/li\u003e\n\u003cli\u003eUniform baking temperature\u003c\/li\u003e\n\u003cli\u003eHigh fluorine resistance\u003c\/li\u003e\n\u003cli\u003eLow outgassing\u003c\/li\u003e\n\u003cli\u003eLittle heavy metal contamination\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XL_US2.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721284644,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/XLDV.jpg?v=1743161256"},{"product_id":"xlf-aluminum-high-vacuum-angle-valve-normally-closed-o-ring-seal","title":"XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cp\u003eXLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL*-2 family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion.  A low sputtering yield and the absence of heavy metals avoid wafer contamination.\u003c\/p\u003e\n\u003cp\u003e \u003c\/p\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XL_US2.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721317412,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/8687l_8264fb6a-a60c-4be1-b5d0-61758a3b37bb.jpg?v=1743161258"},{"product_id":"xlfv-aluminum-high-vacuum-angle-valve-normally-closed-o-ring-seal-with-solenoid-valve","title":"XLFV, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eExcellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve\u003c\/li\u003e\n\u003cli\u003eHigh corrosion resistance to fluorine gas\u003c\/li\u003e\n\u003cli\u003eMinimal outgassing\u003c\/li\u003e\n\u003cli\u003eMinimal contamination from heavy metals\u003c\/li\u003e\n\u003cli\u003eOptional heaters\u003c\/li\u003e\n\u003cli\u003eOptional position sensors\u003c\/li\u003e\n\u003cli\u003eOptional oxalic acid anodizing for internals\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XL_US2.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721350180,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/XLFV.jpg?v=1743161259"},{"product_id":"xls-high-vacuum-angle-valve-electromagnetic-type-bellows-balance","title":"XLS, High Vacuum Angle Valve, Electromagnetic Type,  Bellows Balance","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eParticulates are reduced because there are no sliding metal parts\u003c\/li\u003e\n\u003cli\u003ePressure balance mechanism allows unrestricted exhaust direction\u003c\/li\u003e\n\u003cli\u003eCan be used in portable equipment since air for drive is not required\u003c\/li\u003e\n\u003cli\u003eA control power supply circuit for solenoid valve drive has been made standard\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XL-A_EU.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721382948,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/8495.jpg?v=1743161260"},{"product_id":"xlh-high-vacuum-manual-angle-valve-bellows-seal","title":"XLH, High Vacuum Manual Angle Valve, Bellows Seal","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eHigh vacuum angle valve\u003c\/li\u003e\n\u003cli\u003eType: manual, bellows seal\u003c\/li\u003e\n\u003cli\u003eFlange size: 16 ~ 50\u003c\/li\u003e\n\u003cli\u003eHeater type: H1 (80¡C), H2 (100¡C), H3 (120¡C)\u003c\/li\u003e\n\u003cli\u003eAuto switches not available\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XL_US2.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721415716,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/XLH.jpg?v=1743161261"},{"product_id":"xlc-aluminum-high-vacuum-angle-valve-double-acting-bellows-seal","title":"XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cul style=\"font-variant-numeric: normal; font-variant-east-asian: normal;\"\u003e\n\u003cli\u003eAir pressure applied to pilot port shifts piston-coupled valve\u003c\/li\u003e\n\u003cli\u003eReplaceable bellows reduces maintenance cost and waste material\u003c\/li\u003e\n\u003cli\u003eAdditional maintenance parts available to extend useful life of valve\u003c\/li\u003e\n\u003cli\u003eStandard FKM seals, plus 8 additional seal compound options\u003c\/li\u003e\n\u003cli\u003eAuto switches mountable from 4 directions\u003c\/li\u003e\n\u003cli\u003eOptional 100¡C and 150¡C heaters (UL compliant lead wire)\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XL_US2.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721481252,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/8485El.jpg?v=1743161263"},{"product_id":"xl-q-high-vacuum-angle-valve-aluminum-one-touch-connection-release","title":"XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection \u0026 Release","description":"\u003cp\u003e\nHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.\n\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eOne-touch connection \u0026amp; release, requires no tools\u003c\/li\u003e\n\u003cli\u003eLightweight \u0026amp; compact\u003c\/li\u003e\n\u003cli\u003eAuto switch capable\u003c\/li\u003e\n\u003cli\u003eXLAQ: single acting, normally closed, bellows seal\u003c\/li\u003e\n\u003cli\u003eXLAQ: flange sizes are 16, 25, 40, 50\u003c\/li\u003e\n\u003cli\u003eXLDQ: 2-step control, single acting\u003c\/li\u003e\n\u003cli\u003eXLDQ: flange sizes are 40, 50\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XLAQ_XLDQ.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721514020,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/8485_6896ccc5-b41b-4f68-944b-9fee514ca451.jpg?v=1743161264"},{"product_id":"xlj-vacuum-angle-valve-w-release-valve","title":"XLJ, Vacuum Angle Valve w\/Release Valve","description":"\u003cp\u003eXLJ is a limited release series pairing a vacuum angle valve with a release valve.  The release valve allows atmospheric pressure to enter the system between the rotary pump and vacuum valve.  This prevents the undesirable reverse flow of oil through the pump.  The vacuum valve is a normally closed type with a vacuum pilot and o-ring shaft seal.  Two flange sizes are available with 8 voltage options.  XLJ is CE marked.\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eCompatible with inert gases\u003c\/li\u003e\n\u003cli\u003eFlange sizes: 25 and 40\u003c\/li\u003e\n\u003cli\u003eOperating pressure range: Atmospheric to 0.01 Pa\u003c\/li\u003e\n\u003cli\u003eOperating temperature: 5-40¡C\u003c\/li\u003e\n\u003cli\u003eVoltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XLJ.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721546788,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/XLJ.jpg?v=1743161265"},{"product_id":"xm-and-xy-high-vacuum-valves-stainless-steel-angle-and-in-line-types","title":"XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line Types","description":"\u003cp\u003eSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body material of the XL is aluminum. The XM series is interchangeable with the XL series. The precision cast, one piece manufacturing process of the XY series prevents imperfections due to accumulation of gas and ensures no porosity in the body.\u003c\/p\u003e\n                    \u003cul\u003e\n\u003cli\u003eAngle or in-line type\u003c\/li\u003e\n\u003cli\u003eSCS 13 body material (conforms to SUS304)\u003c\/li\u003e\n\u003cli\u003eA precision casting, unified composition prevents accumulation of gas\u003c\/li\u003e\n\u003cli\u003eMore than 2 million cycles service life (air operated valve)\u003c\/li\u003e\n\u003cli\u003eLight weight and compact\u003c\/li\u003e\n\u003c\/ul\u003e \u003ca href=\"https:\/\/content2.smcetech.com\/pdf\/XM_XY.pdf\" class=\"pdf-button\" target=\"_blank\"\u003eDownload PDF\u003c\/a\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":42197721579556,"sku":null,"price":0.0,"currency_code":"CAD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0703\/8454\/9924\/files\/8480.jpg?v=1743161266"}],"url":"https:\/\/hakpneumatic.com\/collections\/angle-and-in-line-valves.oembed","provider":"HAK Fluid Power Equipment LTD","version":"1.0","type":"link"}